Accelerate 4D-STEM Data Acquisition
Capture diffraction and EDS datasets in minutes with high-speed beam precession and Dectris Quadro detection.
Tescan TENSOR delivers precise strain mapping, phase orientation, and high-throughput compositional analysis in one integrated analytical STEM platform, with precession-assisted 4D-STEM for advanced semiconductor device characterization.
With sub-2 nm resolution of precession-assisted 4D-STEM, automated beam alignments, and real-time visualization of processed 4D-STEM data, TENSOR ensures clarity, speed, and reproducibility of analytical measurements, from quantitative 2D strain analysis to phase analysis and grain mapping in polycrystalline thin films.
Accelerate 4D-STEM Data Acquisition
Capture diffraction and EDS datasets in minutes with high-speed beam precession and Dectris Quadro detection.
Resolve Sub-2 nm Strain Mapping
Analyze fine structural details in FinFET and nanosheet gates-all-around transistors for precise strain engineering and defect identification.
Quantify different phases in polymorphic thin films
Assess different phases in process development of ferroelectric transistors and other functional polycrystalline thin films.
Automate Beam Alignments and Tilting to a Zone-Axis
Remove manual setup steps with fully automated alignment and intuitive tilt-to-zone-axis functions for consistent, reproducible results.
Protect Samples with Near-UHV Conditions
Maintain sample integrity and prevent contamination during extended analysis for cleaner imaging and accurate measurements.
Integrate STEM, EDS, and Precession Diffraction
Combine structural, chemical, and phase analyses in a single platform for efficient multimodal characterization.
Visualize Results in Real Time with Explore™
View processed diffraction and elemental maps already during acquisition for immediate insights and faster decision-making.
Multimodal 4D-STEM and EDX characterization of metal particles at the nanoscale.
Resolve structurally similar crystalline phases with Tescan TENSOR by combining synchronized 4D-STEM and EDX signals for precise and reliable phase mapping.
Crystallographic analysis of deformation cells and kink bands using Tescan TENSOR.
Solve crystal structures including hydrogens at sub-Angstrom resolution with precession-assisted 3D-ED workflow on Tescan TENSOR.
This workflow combines 3D electron diffraction and 4D-STEM mapping to identify and validate a secondary phase in thermoelectric Cu-rich sulfide ceramics — all from the same sample lamella.
Use Tescan TENSOR with integrated beam precession to perform analytical STEM measurements either with existing automated workflows or develop new workflows with own advanced methods.
Revealing nanoscale structure–performance relationships in cathodes and anodes using Tescan TENSOR.
The central interface for STEM imaging, EDScompositional analysis and mapping, precession electron diffraction, and 4D-STEMworkflows. Process acquired data on-the-fly and visualize results live duringthe microscope session. Reduce time from scan to insight with real-timeoverlays, pattern recognition, and mapping tools.
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Tescan TENSOR
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Accelerating Voltage: 100 kV |
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STEM Resolution: 2.8 Å |
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Beam Precession Frequency: 72,000 Hz |
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Diffraction Detector: Direct Electron (DED), |
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EDS System: Dual windowless detectors with 2.0 sr solid angle |
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Vacuum System: Near-UHV vacuum in sample area (<10⁻⁶ Pa) |
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Beam Blanking: Integrated electrostatic beam blanker |
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Precession Angle Range: 0.1° to 3.0° |
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Automation Features: Beam alignments, Tilt to the zone axis, Measurement presets |
|
Tescan TENSOR
|
|---|
|
Accelerating Voltage: 100 kV |
|
STEM Resolution: 2.8 Å |
|
Beam Precession Frequency: 72,000 Hz |
|
Diffraction Detector: Direct Electron (DED), |
|
EDS System: Dual windowless detectors with 2.0 sr solid angle |
|
Vacuum System: Near-UHV vacuum in sample area (<10⁻⁶ Pa) |
|
Beam Blanking: Integrated electrostatic beam blanker |
|
Precession Angle Range: 0.1° to 3.0° |
|
Automation Features: Beam alignments, Tilt to the zone axis, Measurement presets |
Tescan
Libušina třída 21
623 00 Brno
Czech Republic
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