Scale your semiconductor workflows with fast, dependable ex situ lift-out
Tescan EXLO streamlines ex situ lift-out with a motorized XYZR manipulator, parfocal zoom optics, and intuitive software. It supports samples up to 50 mm, coordinate import/export, and optional upgrades. Increase throughput and cut specimen costs with full compatibility across multiple FIBs and TEM AutoPrep Pro™.
Key benefits
- Reduce the cost per TEM specimen
- Maximize FIB-SEM utilization
- Increase lab efficiency
- Ensure high-quality, reproducible TEM results across high specimen volumes
- Assure specimen stability and attachment reliability
- Ensure the integrity of air-sensitive and cryo-prepared specimens
