Navigate Samples Easily with Wide Field Optics™
Begin with a clear SEM overview at magnifications as low as 2×. Wide Field Optics™ supports fast, confident movement across large, complex, or tilted samples without switching to an optical camera.
Tescan VEGA™ Scanning Electron Microscope (SEM) with tungsten filament electron source combines SEM imaging and elemental composition analysis in a single window of Tescan’s Essence™ software. This significantly simplifies acquisition of both morphological and elemental data from the sample, making VEGA™ SEM an efficient analytical solution for routine materials inspection in quality control, failure analysis and research labs.
With intuitive navigation, dependable beam performance, and flexible detector options, VEGA™ provides reliable, user-friendly SEM for routine analytical work.
Navigate Samples Easily with Wide Field Optics™
Begin with a clear SEM overview at magnifications as low as 2×. Wide Field Optics™ supports fast, confident movement across large, complex, or tilted samples without switching to an optical camera.
Image Non-Conductive or Sensitive Samples with Low Vacuum modes Modes
Use SingleVac™ for quick charge reduction or MultiVac with gaseous SE detection to capture detailed topography on uncoated, beam-sensitive, or outgassing materials.
Achieve Reliable Imaging and Analysis with In-Flight Beam Tracing™
Maintain optimal imaging and analytical conditions automatically and switch between them with a single click. No need for mechanical adjustments.
Protect Hardware with the Essence™ 3D Collision Model
Move with confidence during stage rotations or tilt. VEGA™’s real-time 3D collision simulation models detectors, samples, and chamber geometry to prevent unwanted contact.
Analyze Composition Rapidly with Integrated Essence™ EDS
Correlate morphology and elemental data in the same live SEM window. Essence™ EDS streamlines setup and provides instant access to spectra, maps, and profiles.
Expand Analytical Capability with Modular Detector Options
Adapt workflows with optional BSE detectors, CL, ONCam™ optical navigation or other detectors. VEGA™ supports scalable analytical configurations for evolving laboratory needs.
Reliable SEM imaging and microanalysis for diverse materials
Tescan VEGA™ enables researchers to investigate microstructures, defects, and composition efficiently across a wide range of materials. Consistent beam performance, intuitive navigation, and integrated EDS help users generate repeatable, actionable data for research and routine laboratory workflows.
Fast, dependable SEM workflows for routine inspection tasks
Quality control teams benefit from VEGA™’s streamlined operation, rapid transitions between imaging and EDS, and dependable low-vacuum options for unprepared samples. VEGA™ supports repeatable inspections that reduce time-to-decision across manufacturing and failure-prevention workflows.
User-friendly SEM operation for shared environments
VEGA™ supports academic, government, and institutional labs that require a reliable, flexible SEM for diverse projects and multiple users. Its balance of usability, analytical capability, and robust hardware makes it an ideal platform for teaching, training, and collaborative research.
Unified Control for Imaging and Analysis
Tescan Essence™ is the graphical user interface for Tescan VEGA™, bringing SEM imaging, EDS analysis, navigation, and system protection tools into a single interface. It keeps routine workflows efficient and consistent, whether used in materials research, industrial inspection, or multi-user facilities.
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Tescan VEGA™ |
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Electron column |
Tungsten heated cathode |
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Electron Beam Resolution |
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Magnification |
2x to 1,000,000x
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Electron Beam Landing Energy Range |
200 eV - 30 keV
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Probe Current |
1 pA – 2 uA (continuosly adjustable)
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Detectors
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Standard Detectors |
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Optional Detectors* |
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Optional Analyzers* |
Tescan Essence EDS (integrated)
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Accessories |
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Stage & Sample
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Chamber type** |
GM chamber (20+ ports)
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Stage |
Motorized, 5-axis compucentric stage
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X & Y axis travel range |
130 mm
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Z axis travel range |
100 mm
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Rotation |
Compucentric, 360° (continuous)
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Tilt range |
Compucentric, -70° to +90°
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Max. specimen height |
92 mm (133 mm without stage rotation)
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Max. specimen size |
180 mm diameter with full XY moves, rotation, no tilt (larger samples possible with limited stage travel and rotation)
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Maximum specimen weight |
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Vacuum system
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Pump types |
Oil rotary pump
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Vacuum options |
MultiVac mode (up to 500 Pa (N2 or H2O)
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*Optional and other detectors, analyzers and accessories available upon request |
**Different chamber type available upon request |
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Tescan VEGA™ | ||
|
Electron column |
Tungsten heated cathode | |
|
Electron Beam Resolution |
| |
|
Magnification |
2x to 1,000,000x
| |
|
Electron Beam Landing Energy Range |
200 eV - 30 keV
| |
|
Probe Current |
1 pA – 2 uA (continuosly adjustable)
| |
|
Detectors
| ||
|
Standard Detectors |
| |
|
Optional Detectors* |
| |
|
Optional Analyzers* |
Tescan Essence EDS (integrated)
| |
|
Accessories |
| |
|
Stage & Sample
| ||
|
Chamber type** |
GM chamber (20+ ports)
| |
|
Stage |
Motorized, 5-axis compucentric stage
| |
|
X & Y axis travel range |
130 mm
| |
|
Z axis travel range |
100 mm
| |
|
Rotation |
Compucentric, 360° (continuous)
| |
|
Tilt range |
Compucentric, -70° to +90°
| |
|
Max. specimen height |
92 mm (133 mm without stage rotation)
| |
|
Max. specimen size |
180 mm diameter with full XY moves, rotation, no tilt (larger samples possible with limited stage travel and rotation)
| |
|
Maximum specimen weight |
| |
|
Vacuum system
| ||
|
Pump types |
Oil rotary pump
| |
|
Vacuum options |
MultiVac mode (up to 500 Pa (N2 or H2O)
| |
|
*Optional and other detectors, analyzers and accessories available upon request |
**Different chamber type available upon request |
Tescan
Libušina třída 21
623 00 Brno
Czech Republic
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