Tescan VEGA SEM

Tescan VEGA Scanning Electron Microscope (SEM) with tungsten filament electron source combines SEM imaging and elemental composition analysis in a single window of TESCAN’s Essence™ software. This significantly simplifies acquisition of both morphological and elemental data from the sample, making VEGA SEM an efficient analytical solution for routine materials inspection in quality control,
failure analysis and research labs.

With intuitive navigation, dependable beam performance, and flexible detector options, VEGA provides reliable, user-friendly SEM for routine analytical work.

Navigate large or complex samples effectively with Wide Field Optics™ providing a clear SEM overview at low magnification

Correlate morphology and elemental composition with integrated Essence™ EDS.

Maintain optimal imaging conditions automatically with In-Flight Beam Tracing™

Image non-conductive or beam-sensitive samples using SingleVac™ or MultiVac with gaseous SE detection

Protect detectors and samples with the Essence™ 3D Collision Model

HOW TESCAN VEGA ENHANCES SEM WORKFLOWS

FOR MATERIALS ANALYSIS AND INSPECTION

Navigate Samples Easily with Wide Field Optics™

Begin with a clear SEM overview at magnifications as low as 2×. Wide Field Optics™ supports fast, confident movement across large, complex, or tilted samples without switching to an optical camera.

Achieve Reliable Imaging and Analysis with In-Flight Beam Tracing™

Maintain optimal imaging and analytical conditions automatically. Need for mechanical adjustments and switching conditions with a single click.

Analyze Composition Rapidly with Integrated Essence™ EDS

Correlate morphology and elemental data in the same live SEM window. Essence™ EDS streamlines setup and provides instant access to spectra, maps, and profiles.

Image Non-Conductive or Sensitive Samples with Low Vacuum modes Modes

Use SingleVac™ for quick charge reduction or MultiVac with gaseous SE detection to capture detailed topography on uncoated, beam-sensitive, or outgassing materials.

Protect Hardware with the Essence™ 3D Collision Model

Move with confidence during stage rotations or tilt. VEGA’s real-time 3D collision simulation models detectors, samples, and chamber geometry to prevent unwanted contact.

Expand Analytical Capability with Modular Detector Options

Adapt workflows with optional BSE detectors, CL, ONCam™ optical navigation or other detectors. VEGA supports scalable analytical configurations for evolving laboratory needs.

TESCAN VEGA APPLICATIONS

Tescan VEGA in Materials Science

Reliable SEM imaging and microanalysis for diverse materials

Perform detailed topography and morphology analysis using stable SE and BSE imaging
Correlate morphology and composition instantly with fully integrated Essence™ EDS.

Handle non-conductive or beam-sensitive samples using SingleVac™ or MultiVac low vacuum modes

Support characterization across metals, ceramics, polymers, and composites with flexible detector configurations

Tescan VEGA enables researchers to investigate microstructures, defects, and composition efficiently across a wide range of materials. Consistent beam performance, intuitive navigation, and integrated EDS help users generate repeatable, actionable data for research and routine laboratory workflows.

Tescan VEGA in Industrial Inspection & Quality Control

Fast, dependable SEM workflows for routine inspection tasks

Verify surface features and defects quickly with high-contrast SE/BSE imaging
Assess coatings, interfaces, and fractures with stable imaging
Perform rapid compositional checks using Essence™ EDS in the SEM window
Inspect large or bulky samples supported by VEGA’s spacious GM chamber and wide stage travel

Quality control teams benefit from VEGA’s streamlined operation, rapid transitions between imaging and EDS, and dependable low-vacuum options for unprepared samples. VEGA supports repeatable inspections that reduce time-to-decision across manufacturing and failure-prevention workflows.

Tescan VEGA in Research & Multi-User Facilities

User-friendly SEM operation for shared environments

Begin workflows easily with Wide Field Optics™ and low-magnification live navigation
Simplify operation for all experience levels using customizable Essence™ software layouts
Prevent hardware collisions with the real-time Essence™ 3D Collision Model
Expand capabilities as research evolves with optional CL, advanced BSE detectors, and other extensions

VEGA supports academic, government, and institutional labs that require a reliable, flexible SEM for diverse projects and multiple users. Its balance of usability, analytical capability, and robust hardware makes it an ideal platform for teaching, training, and collaborative research.

Tescan ESSENCE™

UNIFIED CONTROL FOR IMAGING AND ANALYSIS

ESSENCE™ is the unified control graphical user interface for Tescan VEGA, bringing SEM imaging, EDS analysis, navigation, and system protection tools into a single interface. It keeps routine workflows efficient and consistent, whether used in materials research, industrial inspection, or multi-user facilities.

Access spectra, elemental maps, and imaging data within a single integrated Essence™ contol interface
Maintain consistent beam performance with In-Flight Beam Tracing™
Navigate confidently using the real-time Essence™ 3D Collision Model to protect detectors and samples

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Tescan VEGA

Technical specifications

Tescan VEGA
	Electron column	Tungsten thermionic emitter with aperture-less optics and In-Flight Beam Tracing™ for stable beam performance
	Resolution	3 nm @ 30 kV (high vacuum); 3.4 nm @ 30 kV in low vacuum with GSD detector; 8 nm @ 3 kV;,
	Vacuum modes	Standard SingleVac™ for charge reduction; MultiVac low-vacuum mode with gaseous SE detector (GSD) for imaging non-conductive and outgassing samples
	Stage	5-axis motorized compucentric stage; supports specimens up to 180 mm diameter with full XY movement and rotation (larger samples possible with limited travel and rotation).
	Detectors	SE and BSE detectors (optional); optional advanced BSE detectors, CL, and ONCam optical navigation camera
	Microanalysis	Integrated Essence™ EDS for SEM–EDS correlation, spectral mapping, and compositional profiling within a unified interface.
	Automation	Automated beam optimization, and Essence™ 3D Collision Model for hardware protection

Tescan VEGA
Electron column	Tungsten thermionic emitter with aperture-less optics and In-Flight Beam Tracing™ for stable beam performance
Resolution	3 nm @ 30 kV (high vacuum); 3.4 nm @ 30 kV in low vacuum with GSD detector; 8 nm @ 3 kV;,
Vacuum modes	Standard SingleVac™ for charge reduction; MultiVac low-vacuum mode with gaseous SE detector (GSD) for imaging non-conductive and outgassing samples
Stage	5-axis motorized compucentric stage; supports specimens up to 180 mm diameter with full XY movement and rotation (larger samples possible with limited travel and rotation).
Detectors	SE and BSE detectors (optional); optional advanced BSE detectors, CL, and ONCam optical navigation camera
Microanalysis	Integrated Essence™ EDS for SEM–EDS correlation, spectral mapping, and compositional profiling within a unified interface.
Automation	Automated beam optimization, and Essence™ 3D Collision Model for hardware protection

GET IN Touch

Where you can find us:

Tescan Brno
Libušina třída 21
623 00 Brno
Czech Republic 

info@Tescan.com