Navigate Samples Easily with the Specimen Overview Map
Begin every session with a clear view of your specimen. The overview map helps you locate regions of interest quickly and intuitively, so you can move across complex samples with confidence.
Novel Automated Platform for Analytical STEM and 4D-STEM Characterization
Tescan TENSOR™
Tescan TENSOR™ delivers fast, multimodal characterization of nanoscale morphological, chemical, and structural properties. It uses STEM imaging, EDS analysis, and advanced 4D-STEM as well as 3D-ED and STEM/EDS tomography workflows. Fully integrated beam precession provides enhanced quality of diffraction data that results in higher accuracy and precision of strain analysis and phase-orientation mapping measurements. With Tescan TENSOR™ you can make confident decisions with data you can trust.
- Characterize samples by multiple modalities using BF/DF STEM imaging, EDS analysis, 3D STEM/EDS tomography, and advanced 4D-STEM and/or 3D-ED workflows.
- Increase yield and reproducibility with automatic microscope alignments that are done in the background with no user intervention.
- Boost productivity with high-speed, high-sensitivity detectors that maintain fast acquisition across all modalities.
- Speed up 4D-STEM workflows with fast beam precession and on-the-fly data processing and analysis.
- Improve diffraction data quality through fully integrated and synchronized beam precession.
- Minimize sample contamination to preserve data quality in the near-UHV vacuum environment of the microscope.
- Support users at every experience level with automation and guided workflows that assure optimal conditions for data acquisition.
with Electron Microscopy Solutions
Tensor in MS
Tescan TENSOR™ analytical STEM diffraction microscope transforms nanoscale characterization of material structure and composition with much higher productivity compared to the traditional TEM/STEM systems on the market.
Fast, multimodal characterization of nanoscale morphological, chemical, and structural properties of functional materials, thin films, synthetic particles, and other samples is achieved flawlessly due to high levels of automation. For conventional STEM imaging and EDS compositional analysis, or advanced 4D-STEM and 3D-ED workflows, diffraction data quality is enhanced by fully integrated and synchronized beam precession.
- Characterize samples by multiple modalities using BF/DF STEM imaging, EDS analysis, STEM/EDS tomography, and advanced 4D-STEM and 3D-ED workflows.
- Increase yield and reproducibility with automatic microscope alignments that are done in the background with no user intervention.
- Boost productivity with high-speed, high-sensitivity detectors that maintain fast acquisition across all modalities.
- Speed up 4D-STEM workflows with fast beam precession and on-the-fly data processing and analysis.
- Improve diffraction data quality through fully integrated and synchronized beam precession.
- Minimize contamination and preserve signal integrity in the near-UHV vacuum environment of the microscope.
- Support users at every level of experience with automation and guided workflows that optimize key parameters.
TENSOR™ gives you the clarity needed to understand the underlying structural and compositional characteristics of materials and relate them to their physical and functional properties. Its multimodal analytical STEM workflows help you bring structure, chemistry, and crystallography together in one sample analysis session.
Tescan TENSOR™ in Materials Science
Transforming TEM/STEM characterization of materials
Tescan TENSOR™ analytical STEM diffraction microscope transforms nanoscale characterization of material structure and composition with much higher productivity compared to the traditional TEM/STEM systems on the market.
Fast, multimodal characterization of nanoscale morphological, chemical, and structural properties of functional materials, thin films, synthetic particles, and other samples is achieved flawlessly due to high levels of automation. For conventional STEM imaging and EDS compositional analysis, or advanced 4D-STEM and 3D-ED workflows, diffraction data quality is enhanced by fully integrated and synchronized beam precession.
- Characterize samples by multiple modalities using BF/DF STEM imaging, EDS analysis, STEM/EDS tomography, and advanced 4D-STEM and 3D-ED workflows.
- Increase yield and reproducibility with automatic microscope alignments that are done in the background with no user intervention.
- Boost productivity with high-speed, high-sensitivity detectors that maintain fast acquisition across all modalities.
- Speed up 4D-STEM workflows with fast beam precession and on-the-fly data processing and analysis.
- Improve diffraction data quality through fully integrated and synchronized beam precession.
- Minimize contamination and preserve signal integrity in the near-UHV vacuum environment of the microscope.
- Support users at every level of experience with automation and guided workflows that optimize key parameters.
TENSOR™ gives you the clarity needed to understand the underlying structural and compositional characteristics of materials and relate them to their physical and functional properties. Its multimodal analytical STEM workflows help you bring structure, chemistry, and crystallography together in one sample analysis session.
Tescan TENSOR™ in Semiconductors
Enabling Advanced 4D-STEM Applications in Semiconductor PFA and PD
Tescan TENSOR™ enables precise strain mapping, phase and crystallinity analysis, and high-throughput compositional and structural measurements to regular TEM operators for routine and reliable characterization of a broad variety of samples.
This integrated analytical STEM platform with synchronized EDS and precession-assisted 4D-STEM systems is designed for advanced semiconductor device analysis. TENSOR™ delivers clarity, speed, and reliability across applications ranging from FinFET strain analysis to quantification of different phases in thin HZO films and to grain size mapping in VNAND stacks.
- Integrated STEM imaging, EDS elemental analysis, and 4D-STEM mapping enhanced by beam precession in one automated platform
- Real-time, interactive 4D-STEM and elemental analysis with immediate visualization of processed results in the Explore™ software
- Automated alignment and tilt-to-zone-axis for reproducible results
- Near-UHV conditions to protect samples from contamination
- High-throughput acquisition with direct electron detector, Dectris Quadro, for crisp electron diffraction and 1.6 srad solid angle for efficient EDX data collection
- Sub-2nm resolution phase-orientation mapping for fine grains in deposited layers
- Sub-2nm resolution strain analysis for FinFET, NS GAA, or C-FET architectures
Tescan TENSOR™ in Batteries
Phase and Orientation Mapping in Lithium-Ion Battery Electrodes
Performance losses in lithium-ion batteries are often driven by local structural changes that are invisible to standard imaging techniques. To understand the real mechanisms behind degradation, phase heterogeneity, and ion transport, a combination of spatially resolved and crystallographically sensitive methods are required.
Tescan TENSOR™, a fully integrated and synchronized multimodal analytical STEM microscope, captures sample morphology, internal crystallinity, and composition by natively correlated STEM imaging, 4D-STEM mapping, and EDS analysis measurements. Revealing nanoscale structure–performance relationships in cathodes and anodes using Tescan TENSOR™ becomes easy and accessible for any operator as routine SEM.
- Precession-assisted diffraction for cleaner patterns and better phase indexing
- Real-time orientation and phase mapping with nanometer spatial resolution
- Compatible with large fields of view and automated workflows for battery R&D
Tescan TENSOR™ in Geoscience
Diffraction-based identification and characterization of geological samples
Accurate mineral identification is crucial for understanding geological processes on and beneath the Earth’s surface. Minerals often exhibit nanocrystalline internal structure and are defined by their distinct elemental composition and atomic arrangement. Therefore, their accurate identification requires both chemical composition and crystal structure determination. However, identification and determination of the atomic structure of unknown minerals remain challenging.
While traditional X-ray diffraction (XRD) techniques require crystals of several microns in size, especially when embedded in complex matrices, TEM-based electron diffraction techniques (4D-STEM and 3D-ED) are affected by strong dynamical scattering. Beam precession can significantly reduce the detrimental effects of dynamical scattering and overcome its limitations.
Both major and minor phases can therefore be reliably identified in prepared samples (TEM lamellas) by 4D-STEM phase-orientation mapping, while the structure of unknown phases determined or validated by 3D-ED (precession electron diffraction tomography).
- Identify nanoscale structure and chemistry with combined STEM imaging, 4D-STEM mapping, and EDS elemental analysis
- Resolve crystallographic grains and their orientation using nanobeam diffraction and precession-assisted 4D-STEM
- Map elemental distributions within complex materials and nanoparticle systems using high-sensitivity EDX
- Determine the atomic structure of unknown phases from polycrystalline lamella using a combination of 3D-ED and 4D-STEM techniques with beam precession.
for Characterization of Nanoparticles
TENSOR Applications for Characterization of Nanoparticles
Accurate structural and chemical insight at the nanoscale
- Identify nanoscale structure and chemistry with combined STEM imaging, 4D-STEM mapping, and EDS elemental analysis
- Resolve crystallographic grains and their orientation using nanobeam diffraction and precession-assisted 4D-STEM
- Map elemental distributions within complex materials and nanoparticle systems using high-sensitivity EDX
- Support advanced materials research across academic and industrial environments
TENSOR gives you the clarity needed to understand the underlying structural and compositional characteristics of materials and relate them to their physical and functional properties. Its multimodal analytical STEM workflows help you bring structure, chemistry, and crystallography together in one sample analysis session.
Technical specification
with specialist
