Achieve Pristine Laser Surfaces for Faster Semiconductor Analysis
Tescan FemtoChisel™ is the first system where speed, quality, and correlation come together to accelerate inspection, failure analysis, and targeted internal access. It lowers cost-per-sample while giving you reliable performance on today’s and tomorrow’s most heterogeneous semiconductor materials. Deliver repeatable, high-quality outcomes across every workflow.
Key benefits
- Intelligent Multi-Gas Processing: Real-time gas control tracks the laser for optimal, debris-free ablation.
- Laser Protective Layer (LPL): Apply and remove protection within seconds to prevent beam damage without moving the sample.
- Correlative Machine Vision & Targeting: Multi-resolution imaging automatically identifies and targets regions of interest with sub-micron precision.
- Software-Selectable Laser Wavelength: Switch wavelengths instantly for broader material compatibility and smoother workflows.
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