FemtoChisel
for high-precision semiconductor sample prep

Achieve Pristine Laser Surfaces for Faster Semiconductor Analysis 

Tescan FemtoChisel is the first system where speed, quality, and correlation come together to accelerate inspection, failure analysis, and targeted internal access. It lowers cost-per-sample while giving you reliable performance on today’s and tomorrow’s most heterogeneous semiconductor materials. Deliver repeatable, high-quality outcomes across every workflow. 

Key benefits  

• Intelligent Multi-Gas Processing: Real-time gas control tracks the laser for optimal, debris-free ablation.
  
  
• Laser Protective Layer (LPL): Apply and remove protection within seconds to prevent beam damage without moving the sample.
  
  
• Correlative Machine Vision & Targeting: Multi-resolution imaging automatically identifies and targets regions of interest with sub-micron precision.
  
  
• Software-Selectable Laser Wavelength: Switch wavelengths instantly for broader material compatibility and smoother workflows.