WEBINAR | Up to 40% Faster Automated TEM Lamella Preparation with new Ga⁺ FIB Column

Automated TEM Lamella Preparation for Consistent, High-Throughput Results

Tescan Solaris 2

SOLARIS 1
SOLARIS 1

Tescan SOLARIS 2 is designed for semiconductor laboratories where precision, reproducibility, and throughput are essential. With fully automated TEM lamella preparation powered by TEM AutoPrepTM Pro ,  SOLARIS 2 minimizes operator dependency and ensures consistent, high-quality samples. Intelligent automation and overnight alignments keep the system ready, maximizing uptime and data confidence for every analysis.

  • Fully automated TEM lamella preparation with AI-driven TEM AutoPrepTM Pro

  • Consistent, reproducible results across all lamella geometries

  • Reduced beam damage and optimized surface finish with OrageTM 2 Ga FIB and Triglav™ SEM

  • Customizable automation workflows for logic, memory, and 3D NAND devices

Where Tescan Solaris 2

makes the difference

Automation Without Variability

Eliminate operator-dependent results with AI-driven TEM AutoPrepTM Pro automation. Every lamella is prepared with the same precision, from protection layer deposition to low keV polishing.

Reproducible Quality Across All Geometries

Whether top-down, inverted, or  plan-view, SOLARIS 2 ensures consistent results through optimized single-step, in situlift-out workflows.

Higher Throughput, Less Downtime

Automated electron and ion column alignments keep the system ready at all times—reducing setup time and enabling continuous, unattended operation.

Minimal Beam Damage, Maximum Precision

The OrageTM 2 Ga FIB column and Triglav™ SEM optics deliver high-resolution milling and end-pointing with minimal amorphization or surface alteration.

Customizable Workflows for Every Device

Easily adapt processes for logic, memory, power, or display technologies. Switch between semi-automated and fully automated modes as your workflow demands.

Always Ready for Next-Shift Performance

With self-checking routines and overnight alignment, SOLARIS 2 maintains stable performance and reproducible precision—day after day.

Tescan Solaris 2 Applications

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Tescan SOLARIS 2 in Semiconductors

Automated precision for process development and failure analysis

  • Fully automated TEM lamella preparation for logic, memory, and 3D NAND devices

  • AI-driven TEM AutoPrepTM Pro ensures consistent targeting and thickness across various samples

  • OptiLift™ nanomanipulator supports top-down, inverted, and plan-viewlift-out geometries

  • Integrated Triglav™ SEM column provides high-contrast end-point detection for advanced node structures

TescanSOLARIS 2 streamlines semiconductor workflows where reproducibility and throughput are critical. Automated routines and overnight alignments keep the system ready, enabling engineers to produce high-quality lamellae for yield analysis, process optimization, and failure diagnostics—without compromising device integrity or throughput.

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Tescan SOLARIS 2 in Materials Science

Reliable automation for complex materials and device structures

  • High-precision Ga FIB-SEM milling for metals, ceramics, and composite interfaces

  • Customizable workflows for site-specific cross-sections and plan-viewlamella preparation

  • Stable, automated beam alignment maintains consistent quality across long sessions

  • Compatible with semi-automated or fully automated operation for flexible research demands

In materials science, SOLARIS 2 brings consistency to demanding sample preparation. Its intelligent automation minimizes user variability while maintaining surface integrity and structural fidelity—ideal for analyzing multi-phase materials, thin films, or nanoscale defects with reproducible accuracy.

Tescan SOLARIS 2 in Nanotechnology

Precision control for beam-sensitive and delicate nanostructures

  • Low-damage ion milling and optimized end-pointing preserve fragile nanostructures

  • Accurate preparation of nanowires, quantum dots, and thin-film interfaces

  • Supports cryo and low-voltage workflows for sensitive materials

  • Enables repeatable, artifact-free lamellae suitable for high-resolution TEM and STEM analysis

TescanSOLARIS 2 extends the laboratory’s capabilities into advanced nanotechnology research. Its combination of gentle milling, stable automation, and high-contrast imaging ensures the structural and chemical integrity of even the most beam-sensitive specimens—ready for nanoscale investigation with confidence.

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Tescan SOLARIS 2 in Life Sciences

Advanced analytical tool for 2D and 3D characterization of your biological and beam sensitive samples.

  • Low-keV, high-contrast BSE imaging – Reveal resin-embedded biological structures in 2D and 3D with exceptional clarity.

  • UHR-SEM Immersion Optics – Provides detailed imaging of delicate structural details, and thanks to the specific SE contrast also useful for volume imaging of frozen hydrated samples.

  • Best resolution Ga+ FIB column (< 2.5 nm resolution) with optimized ion optics for excellent performance and reproducibility

  • Robust Cryo and Ambient Performance

  • Elemental and chemical analysis – Perform FIB-SEM/EDX and TOF-SIMS on beam-sensitive biological specimens.

  • Tescan Essence™ Software: Designed for multi-user environments, ensuring effortless operation regardless of experience level. 

Designed for precision and flexibility, SOLARIS 2 brings together low-keV, high-contrast imaging with advanced analytical and correlative workflow to clearly visualize biological ultrastructure in 2D and 3D. 

 

TescanTEM AutoPrep™ Pro

AUTOMATION THAT INCREASES REPRODUCIBILITY

TescanSOLARIS 2 integrates seamlessly with TescanTEM AutoPrep™ Pro, delivering a fully automated workflow for TEM lamella preparation inside the FIB-SEM. From trench milling to final polishing, every step is automated to ensure consistent, repeatable results with minimal operator input.

AI-driven pattern recognition and automated beam alignment streamline targeting and setup, while overnight calibration keeps the system ready for continuous operation. Integrated OptiLift™ nanomanipulator control supports top-down, inverted, and plan-viewgeometries without manual repositioning.

Combined with the Triglav™ SEM column’s high-contrast imaging for precise end-point detection, SOLARIS 2 with TEM AutoPrep™  Pro delivers reproducible, high-quality TEM samples for logic, memory, and advanced 3D device analysis.

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Tescan SOLARIS 2

Technical specification

Tescan SOLARIS 2

FIB source
Gallium liquid metal ion source
SEM column
Triglav™ UHR SEM with SE and BSE detectors
Automation
TEM AutoPrep™ Pro for fully automated lamella preparation Automated e-/i-beam alignments
Nanomanipulator
OptiLift™ below-FIB design for top-down, inverted, and planar lift-out
Sample geometries
Standard, inverted, plan-viewand double-cross lamella
Stage
5-axis motorized stage
Imaging resolution
< 1.0 nm @ 15 kV (SE), < 1.2nm  @ 1 kV (UHR mode)
Workflow modes
Semi-automated and fully automated operation
Transfer compatibility
Cryo, vacuum, and inert-gas workflows
Workstation
Integrated control computer with joystick and live optical imaging

Tescan SOLARIS 2

FIB source
Gallium liquid metal ion source
SEM column
Triglav™ UHR SEM with SE and BSE detectors
Automation
TEM AutoPrep™ Pro for fully automated lamella preparation Automated e-/i-beam alignments
Nanomanipulator
OptiLift™ below-FIB design for top-down, inverted, and planar lift-out
Sample geometries
Standard, inverted, plan-viewand double-cross lamella
Stage
5-axis motorized stage
Imaging resolution
< 1.0 nm @ 15 kV (SE), < 1.2nm  @ 1 kV (UHR mode)
Workflow modes
Semi-automated and fully automated operation
Transfer compatibility
Cryo, vacuum, and inert-gas workflows
Workstation
Integrated control computer with joystick and live optical imaging
SOLARIS  2

GET IN Touch

Contact us

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Where you can find us:

Tescan Brno
Libušina třída 21
623 00 Brno
Czech Republic



info@Tescan.com