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Gain Clarity for Faster Process Development with Package Metrology Workflows 

 

Accelerate process development with real-time phase and orientation mapping. Get clear insight into nanoscale structures to guide decisions with speed and confidence.

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Tescan solutions

for advanced research in semiconductors
Fast 4D-STEM Phase Mapping for PCM Devices

Combine Tescan’s 4D-STEM workflow with integrated beam precession to achieve fast, accurate phase and orientation mapping in semiconductor devices. Structural insights are delivered in under 15 minutes, supporting both failure analysis and process optimization.

  • Precession-assisted 4D-STEM: Minimizes dynamical effects and captures crystalline, amorphous, and mixed-phase regions in a single scan
  • Real-time mapping: Provides immediate results with automated cross-correlation and no manual tuning
  • High-throughput analysis: Reveals structural changes in materials like PCM for reliable process development
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Tescan Solutions

for Metrology and Process Development

Tescan TENSOR

Tescan TENSOR is an analytical STEM platform for fast, reproducible strain, phase, and composition analysis of semiconductor devices.

It integrates 4D-STEM, beam precession, and high-throughput EDS to deliver precise nanoscale structural and elemental characterization. Optimized for automation and consistency, TENSOR ensures high productivity across shifts and sites.

  • Precession-enhanced 4D-STEM: Provides high-precision strain and phase mapping, even at the 3 nm node

  • Automated alignments and workflows: Reduce operator variability with real-time data processing

  • Low-dose, high-current operation: Minimizes sample damage and contamination in near-UHV conditions
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Our global team is available to answer questions about Tescan solutions for Semiconductors.

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Where can you find us:

Tescan
Libušina třída 21
623 00 Brno
Czech Republic

info@Tescan.com 

130405923 us US 37.09024 -95.712891 25.3575 29.349345 20.67957527 42.082797 39.91384763 -33.693421 13.93320106 3.039986586 31.997988 38.050985 47.579533 48.1485965 58.375799 54.663142 19.195447 56.975106 50.493053 45.868592 10.79556993 44.35660598 43.2371604 55.536415 14.557577179752773 32.100937 -6.116829 -6.212299277967318 23.7104 -33.471062 31.998740087 -23.69149395 43.462349 51.529848 49.1893523 49.197486 25.072375 31.075811 1.299027 40.676979 52.30150662 51.013813 35.684121 37.479653 52.246622 40.581349 39.911632 -26.1811371 41.818215 33.429928

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