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Versatile System for Optimized Performance at Ultra-High Vacuum

Tescan NanoSpace 

Tescan NanoSpace modular UHV FIB-SEM system
Tescan NANOSPACE product page 1

NanoSpace is a versatile system designed to operate under ultra-high vacuum (UHV) conditions. Its modular architecture allows the installation of a wide range of SEM and FIB columns, providing a comprehensive, customizable solution for high-resolution, contamination-free FIB nanomachining and advanced surface analysis in semiconductors, and materials science research.

  • Fully customizable and modular system to fulfill specific research and analytical needs, configurable as multi FIB-SEM, dual FIB-FIB, mono-beam FIB, or stand-alone SEM. 

  • Local metal deposition and selective etching with UHV-compatible GIS.  

  • Seamless connection to third-party UHV systems such as MBE clusters, APT chambers, or synchrotron beamlines.

Where Tescan NanoSpace™

makes the difference

Full UHV design - Contamination free  environment

Tescan NanoSpace is the first UHV-designed FIB-SEM instrument, fully bakeable to reach the ultimate vacuum level.

Fully customizable and modular system

Tescan NanoSpace can be customized in order to completely fulfill your specific needs. Total flexibility is given in selecting the FIB column, either with LMAIS, gas plasma ion source, Wien Filtered Liquid Metal Alloy Ion Source (LMAIS), or Wien filtered gas plasma ion source. 

Designed to perform high quality surface analysis using SIMS

Excellent conditions and unique dual beam geometry allow correlation of in-situ SEM and high quality Secondary Ion Mass Spectrometry images in a single instrument. 

Accurate sample control

The 6-axis stage UHV compatible allows for loading samples which dimensions up to 100 mm in length and width.

UHV connection

A UHV intermediate chamber is designed to ensure Nanospace’s connection to third party UHV instruments, process cluster or synchrotron beam line. 

Fully automated instrument

NanoSpace control and imaging software is highly ergonomic and easy to use. Control of the vaccum system is fully automated to ensure safe, fast and easy vacuum operations. 

High resolution imaging

Tescan NanoSpace is equipped with two different high-resolution electron beam columns, either fully electrostatic or electromagnetic. In combination with the Secondary Electron Detector, Tescan Nanospace produces high-quality images. 

Tescan AMBER X2 Applications

_ Application area icon
Tescan AMBER X2 in Materials Science

Gain the detail you need to understand how materials behave, from nanoscale structures to millimeter-scale volumes.

  • Comprehensive 3D characterization for microstructural studies
  • Automated TEM lamella preparation with TEM AutoPrep Pro™
  • Correlative multimodal analysis combining EDS, EBSD and ToF-SIMS
  • Large-volume milling for full-field reconstruction and structural insight

AMBER X2 gives materials scientists a reliable way to study metals, ceramics, polymers and composites with both precision and scale. Its Xe plasma FIB and field-free SEM architecture support high-resolution imaging without unnecessary beam damage. This helpa you explore structure–property relationships and track material changes under load, heat or environmental exposure.

Application area=BT-1
Tescan AMBER X2 in Energy and Batteries

Get a clearer view of electrode architecture, interface behavior, and the mechanisms that drive degradation.

  • Damage-free plasma FIB-SEM workflows for electrodes and interfaces
  • Cross-sectioning and 3D reconstruction of electrodes and solid-state architectures
  • Correlative EDS and ToF-SIMS for chemical and structural gradients
  • Safe, contamination-free milling of lithium-containing and beam-sensitive materials

AMBER X2 helps battery researchers examine internal structures with clarity, from active material morphology to subtle interface changes. Its high-throughput plasma FIB and multimodal analysis tools reveal degradation pathways, lithium distribution patterns, and stability issues. This gives you the insight needed to refine materials and design more reliable energy-storage systems.

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Tescan AMBER X2 in Semiconductors

Uncover the electrical and structural details of today’s most advanced devices

Uncover the electrical and structural details of today’s most advanced devices with Tescan AMBER X 2 Plasma FIB-SEM. Purpose-built for semiconductor applications, AMBER X 2 combines Xe plasma FIB with proprietary Nanoflat, Chase, and C-Maze chemistries to deliver uniform, artifact-free delayering at sub-10 nm nodes.

The system ensures you have reproducible workflows across logic, memory, and I/O regions, supporting electrical fault isolation, failure analysis, and transistor-level probing.

  • Perform artifact-free delayering with Nanoflat, Chase, and C-Maze chemistries
  • Protect device integrity using low-kV Xe Plasma FIB milling
  • Control every step with end-point detection and live monitoring
  • Integrate delayering with in situ nanoprobing in a single workflow
  • Deprocess I/O and thick metal layers using low angle polishing

Resolve critical details with BrightBeam™ UHR SEM imaging at sub-500 eV

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Tescan AMBER X2 in Life Sciences

Work confidently across cryogenic and room-temperature workflows, whether you're studying ultrastructure or preparing samples for high-resolution imaging.

  • Large-volume 3D FIB-SEM tomography of hard biological materials, including bone, shell and dental tissue
  • High-quality cryo lamella preparation with MISTRAL™ Plasma FIB for fast rough milling and precise low-energy polishing
  • Integrated CLEM workflows with METEOR 2.0 for accurate ROI targeting
  • Built-in cryo nanomanipulator for temperature-controlled, reliable lift-out
  • Advanced analytical options including EDS, ToF-SIMS and EBSD

AMBER X2 brings plasma FIB speed to demanding life science studies, from large-volume 3D analysis to delicate cryo sample preparation. Its stable beam performance helps you obtain clean, artifact-free results across biological interfaces, mineralized tissues and complex structural hierarchies.

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Tescan NanoSpace™

Technical specification

Electron Optics

Electron Beam Column

eCLIPSE electrostatic SEM column

Electron Beam Resolution

  • 55 nm @ 1 keV (field-free)
  • 10nm @ 15 keV (field-free)
  • <4 nm @ 30 keV  (field-free)

Magnification 

6x to 2,000,000x 

Electron Source 

Schottky field electron emitter 

Electron Beam Landing Energy Range 

500 eV - 30 keV  

Probe Current

 2 pA – 100 nA

Electron Optics

Electron Beam Column

BrightBeam™ Field-Free UHR-SEM Column 

Electron Beam Resolution

  • 2.5 nm @ 1 keV (field-free)

  • 1.6 nm @ 15 keV (field-free)

  • 1.5 nm @ 30 keV STEM (field-free)

Magnification 

6x to 2,000,000x 

Electron Source 

Schottky field electron emitter 

Electron Beam Landing Energy Range 

50 eV - 30 keV  

Probe Current

2 pA – 400 nA (continuosly adjustable) 

Ion Optics

Ion Beam Column 

DeepFIB LMIS Focused Ion Beam Column 

Ion Beam Resolution 

2.5 nm @ 30 keV 

Maximum Field of View 

1 mm @ 30 keV 

Probe Current

1 pA - 135 nA 

Ion Beam Energy Range 

500 eV - 30 keV 

Ion Optics

Ion Beam Column 

Mistral™ Plasma Focused Ion Beam Column 

Ion Beam Resolution 

10 nm @ 30 keV 

Maximum Field of View 

1 mm @ 30 keV 

Probe Current

1 pA - 3.3 uA 

Ion Beam Energy Range 

500 eV - 30 keV 

Ion Optics

Ion Beam Column 

iVeloce Plasma Focused Ion Beam Column

Ion Species

 Xe+, O+, Ar+, He+, N+, N2+,C+, ...  

Ion Beam Resolution 

25 nm @ 30 keV 

Maximum Field of View 

1 mm @ 30 keV 

Total probe current 

1 pA–250 nA 

Filtered Current

 Ion Beam Energy Range

Ion Beam Energy Range 

3 keV - 30 keV 

Ion Optics

Ion Beam Column 

Veloce LMAIS Focused Ion Beam Column 

Ion Species

Ga+, Ge+, Ge2+, Au+, Au2+, Si+, Au cluster 

Ion Beam Resolution 

6 nm @ 30 keV 

Maximum Field of View 

1 mm @ 30 keV 

Total probe current 

1 pA–50 nA 

Filtered Current

<20 fA to 15 nA 

Ion Beam Energy Range 

3 keV - 30 keV 

TOF-SIMS

Lateral resolution 

< 30 nm in Ga+ FIB
< 60 nm with Plasma FIB

Depth Resolution 

< 3 nm in Ga+ FIB
< 1 nm in Plasma FIB

Detection limit 

< 1ppm 

Mass Resolution on 28Si  

> 4,500 

Mass range  

1-500 

Detectors 

Standard Detectors 

  • Everhart-Thornley chamber SE detector

  • In-column SE detector (MD) in the Brightbeam SEM 

  • In-column axial BSE/SE detector (Axial) in the Brightbeam SEM 

  • pA meter incl. touch alarm function

  • Chamber View IR Camera

Optional Detectors 

  • Secondary ion detector (SITD)

  • Low energy, scintillator type, retractable BSE with shutter (LE-BSE)

  • High sensitivity, solid state, retractable, 4 quadrant BSE (4Q LE-BSE)

  • Retractable STEM detector (HADF R-STEM)

Optional third party Analyzers 

  • EDS
  • EBSD

Gas Injection system 

Optional three-reservoir Gas Injection System solution 

EnerGIS 

Stage & Sample 

Stage 

Motorized, 6-axis stage 

X & Y axis travel range 

100 mm 

Z axis travel range  

50 mm 

Upper Rotation 

360° (continuous) 

Tilt range 

 '-10° to +65° 

Lower rotation 

 '100° 

Electron Optics

Electron Beam Column

eCLIPSE electrostatic SEM column

Electron Beam Resolution

  • 55 nm @ 1 keV (field-free)
  • 10nm @ 15 keV (field-free)
  • <4 nm @ 30 keV  (field-free)

Magnification 

6x to 2,000,000x 

Electron Source 

Schottky field electron emitter 

Electron Beam Landing Energy Range 

500 eV - 30 keV  

Probe Current

 2 pA – 100 nA

Electron Optics

Electron Beam Column

BrightBeam™ Field-Free UHR-SEM Column 

Electron Beam Resolution

  • 2.5 nm @ 1 keV (field-free)

  • 1.6 nm @ 15 keV (field-free)

  • 1.5 nm @ 30 keV STEM (field-free)

Magnification 

6x to 2,000,000x 

Electron Source 

Schottky field electron emitter 

Electron Beam Landing Energy Range 

50 eV - 30 keV  

Probe Current

2 pA – 400 nA (continuosly adjustable) 

Ion Optics

Ion Beam Column 

DeepFIB LMIS Focused Ion Beam Column 

Ion Beam Resolution 

2.5 nm @ 30 keV 

Maximum Field of View 

1 mm @ 30 keV 

Probe Current

1 pA - 135 nA 

Ion Beam Energy Range 

500 eV - 30 keV 

Ion Optics

Ion Beam Column 

Mistral™ Plasma Focused Ion Beam Column 

Ion Beam Resolution 

10 nm @ 30 keV 

Maximum Field of View 

1 mm @ 30 keV 

Probe Current

1 pA - 3.3 uA 

Ion Beam Energy Range 

500 eV - 30 keV 

Ion Optics

Ion Beam Column 

iVeloce Plasma Focused Ion Beam Column

Ion Species

 Xe+, O+, Ar+, He+, N+, N2+,C+, ...  

Ion Beam Resolution 

25 nm @ 30 keV 

Maximum Field of View 

1 mm @ 30 keV 

Total probe current 

1 pA–250 nA 

Filtered Current

 Ion Beam Energy Range

Ion Beam Energy Range 

3 keV - 30 keV 

Ion Optics

Ion Beam Column 

Veloce LMAIS Focused Ion Beam Column 

Ion Species

Ga+, Ge+, Ge2+, Au+, Au2+, Si+, Au cluster 

Ion Beam Resolution 

6 nm @ 30 keV 

Maximum Field of View 

1 mm @ 30 keV 

Total probe current 

1 pA–50 nA 

Filtered Current

<20 fA to 15 nA 

Ion Beam Energy Range 

3 keV - 30 keV 

TOF-SIMS

Lateral resolution 

< 30 nm in Ga+ FIB
< 60 nm with Plasma FIB

Depth Resolution 

< 3 nm in Ga+ FIB
< 1 nm in Plasma FIB

Detection limit 

< 1ppm 

Mass Resolution on 28Si  

> 4,500 

Mass range  

1-500 

Detectors 

Standard Detectors 

  • Everhart-Thornley chamber SE detector

  • In-column SE detector (MD) in the Brightbeam SEM 

  • In-column axial BSE/SE detector (Axial) in the Brightbeam SEM 

  • pA meter incl. touch alarm function

  • Chamber View IR Camera

Optional Detectors 

  • Secondary ion detector (SITD)

  • Low energy, scintillator type, retractable BSE with shutter (LE-BSE)

  • High sensitivity, solid state, retractable, 4 quadrant BSE (4Q LE-BSE)

  • Retractable STEM detector (HADF R-STEM)

Optional third party Analyzers 

  • EDS
  • EBSD

Gas Injection system 

Optional three-reservoir Gas Injection System solution 

EnerGIS 

Stage & Sample 

Stage 

Motorized, 6-axis stage 

X & Y axis travel range 

100 mm 

Z axis travel range  

50 mm 

Upper Rotation 

360° (continuous) 

Tilt range 

 '-10° to +65° 

Lower rotation 

 '100° 

Ultra-high vacuum chamber configuration of Tescan NanoSpace

Documents

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Where you can find us:

Tescan
Libušina třída 21
623 00 Brno
Czech Republic

130405923 us US 37.09024 -95.712891 25.3575 29.349345 20.67957527 42.082797 39.91384763 -33.693421 13.93320106 3.039986586 31.997988 38.050985 47.579533 30.052597 48.1485965 58.375799 54.663142 19.195447 56.975106 47.916997 50.493053 45.868592 10.79556993 44.35660598 43.2371604 55.536415 14.557577179752773 32.100937 -6.116829 -6.212299277967318 33.600194 -12.08688 23.7104 -33.471062 31.998740087 -23.69149395 43.462349 51.529848 49.1893523 49.197486 25.072375 31.075811 1.299027 40.676979 52.30150662 51.013813 35.684121 37.566531 52.246622 40.581349 39.911632 -26.1811371 41.818215 33.429928

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