Full UHV design - Contamination free environment
Tescan NanoSpace is the first UHV-designed FIB-SEM instrument, fully bakeable to reach the ultimate vacuum level.
WEBINAR | Correlated Microanalytical Workflows for Particle Analysis Using Automated Mineralogy, FIB-SEM and SIMS
Versatile System for Optimized Performance at Ultra-High Vacuum
NanoSpace™ is a versatile system designed to operate under ultra-high vacuum (UHV) conditions. Its modular architecture allows the installation of a wide range of SEM and FIB columns, providing a comprehensive, customizable solution for high-resolution, contamination-free FIB nanomachining and advanced surface analysis in semiconductors, and materials science research.
Full UHV design - Contamination free environment
Tescan NanoSpace is the first UHV-designed FIB-SEM instrument, fully bakeable to reach the ultimate vacuum level.
Fully customizable and modular system
Tescan NanoSpace can be customized in order to completely fulfill your specific needs. Total flexibility is given in selecting the FIB column, either with LMAIS, gas plasma ion source, Wien Filtered Liquid Metal Alloy Ion Source (LMAIS), or Wien filtered gas plasma ion source.
Designed to perform high quality surface analysis using SIMS
Excellent conditions and unique dual beam geometry allow correlation of in-situ SEM and high quality Secondary Ion Mass Spectrometry images in a single instrument.
Accurate sample control
The 6-axis stage UHV compatible allows for loading samples which dimensions up to 100 mm in length and width.
UHV connection
A UHV intermediate chamber is designed to ensure Nanospace’s connection to third party UHV instruments, process cluster or synchrotron beam line.
Fully automated instrument
NanoSpace control and imaging software is highly ergonomic and easy to use. Control of the vaccum system is fully automated to ensure safe, fast and easy vacuum operations.
High resolution imaging
Tescan NanoSpace is equipped with two different high-resolution electron beam columns, either fully electrostatic or electromagnetic. In combination with the Secondary Electron Detector, Tescan Nanospace produces high-quality images.
Gain the detail you need to understand how materials behave, from nanoscale structures to millimeter-scale volumes.
AMBER X2 gives materials scientists a reliable way to study metals, ceramics, polymers and composites with both precision and scale. Its Xe plasma FIB and field-free SEM architecture support high-resolution imaging without unnecessary beam damage. This helpa you explore structure–property relationships and track material changes under load, heat or environmental exposure.
Get a clearer view of electrode architecture, interface behavior, and the mechanisms that drive degradation.
AMBER X2 helps battery researchers examine internal structures with clarity, from active material morphology to subtle interface changes. Its high-throughput plasma FIB and multimodal analysis tools reveal degradation pathways, lithium distribution patterns, and stability issues. This gives you the insight needed to refine materials and design more reliable energy-storage systems.
Uncover the electrical and structural details of today’s most advanced devices
Uncover the electrical and structural details of today’s most advanced devices with Tescan AMBER X 2 Plasma FIB-SEM. Purpose-built for semiconductor applications, AMBER X 2 combines Xe plasma FIB with proprietary Nanoflat, Chase, and C-Maze chemistries to deliver uniform, artifact-free delayering at sub-10 nm nodes.
The system ensures you have reproducible workflows across logic, memory, and I/O regions, supporting electrical fault isolation, failure analysis, and transistor-level probing.
Resolve critical details with BrightBeam™ UHR SEM imaging at sub-500 eV
Work confidently across cryogenic and room-temperature workflows, whether you're studying ultrastructure or preparing samples for high-resolution imaging.
AMBER X2 brings plasma FIB speed to demanding life science studies, from large-volume 3D analysis to delicate cryo sample preparation. Its stable beam performance helps you obtain clean, artifact-free results across biological interfaces, mineralized tissues and complex structural hierarchies.
This is more than information; it's an advantage. We've compiled our technical whitepapers, detailed product flyers, and on-demand webinars to provide you with the knowledge that makes a real difference. Sign up now to access the insights you need to make an impact.
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Electron Optics |
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Electron Beam Column |
eCLIPSE electrostatic SEM column |
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Electron Beam Resolution |
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Magnification |
6x to 2,000,000x |
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Electron Source |
Schottky field electron emitter |
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Electron Beam Landing Energy Range |
500 eV - 30 keV |
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Probe Current |
2 pA – 100 nA |
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Electron Optics |
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Electron Beam Column |
BrightBeam™ Field-Free UHR-SEM Column |
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Electron Beam Resolution |
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Magnification |
6x to 2,000,000x |
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Electron Source |
Schottky field electron emitter |
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Electron Beam Landing Energy Range |
50 eV - 30 keV |
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Probe Current |
2 pA – 400 nA (continuosly adjustable) |
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Ion Optics |
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Ion Beam Column |
DeepFIB LMIS Focused Ion Beam Column |
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Ion Beam Resolution |
2.5 nm @ 30 keV |
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Maximum Field of View |
1 mm @ 30 keV |
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Probe Current |
1 pA - 135 nA |
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Ion Beam Energy Range |
500 eV - 30 keV |
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Ion Optics |
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Ion Beam Column |
Mistral™ Plasma Focused Ion Beam Column |
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Ion Beam Resolution |
10 nm @ 30 keV |
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Maximum Field of View |
1 mm @ 30 keV |
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Probe Current |
1 pA - 3.3 uA |
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Ion Beam Energy Range |
500 eV - 30 keV |
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Ion Optics |
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Ion Beam Column |
iVeloce Plasma Focused Ion Beam Column |
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Ion Species |
Xe+, O+, Ar+, He+, N+, N2+,C+, ... |
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Ion Beam Resolution |
25 nm @ 30 keV |
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Maximum Field of View |
1 mm @ 30 keV |
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Total probe current |
1 pA–250 nA |
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Filtered Current |
Ion Beam Energy Range |
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Ion Beam Energy Range |
3 keV - 30 keV |
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Ion Optics |
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Ion Beam Column |
Veloce LMAIS Focused Ion Beam Column |
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Ion Species |
Ga+, Ge+, Ge2+, Au+, Au2+, Si+, Au cluster |
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Ion Beam Resolution |
6 nm @ 30 keV |
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Maximum Field of View |
1 mm @ 30 keV |
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Total probe current |
1 pA–50 nA |
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Filtered Current |
<20 fA to 15 nA |
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Ion Beam Energy Range |
3 keV - 30 keV |
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TOF-SIMS |
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Lateral resolution |
< 30 nm in Ga+ FIB |
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Depth Resolution |
< 3 nm in Ga+ FIB |
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Detection limit |
< 1ppm |
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Mass Resolution on 28Si |
> 4,500 |
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Mass range |
1-500 |
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Detectors |
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Standard Detectors |
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Optional Detectors |
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Optional third party Analyzers |
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Gas Injection system |
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Optional three-reservoir Gas Injection System solution |
EnerGIS |
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Stage & Sample |
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Stage |
Motorized, 6-axis stage |
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X & Y axis travel range |
100 mm |
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Z axis travel range |
50 mm |
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Upper Rotation |
360° (continuous) |
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Tilt range |
'-10° to +65° |
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Lower rotation |
'100° |
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Electron Optics | |
|
Electron Beam Column |
eCLIPSE electrostatic SEM column |
|
Electron Beam Resolution |
|
|
Magnification |
6x to 2,000,000x |
|
Electron Source |
Schottky field electron emitter |
|
Electron Beam Landing Energy Range |
500 eV - 30 keV |
|
Probe Current |
2 pA – 100 nA |
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Electron Optics | |
|
Electron Beam Column |
BrightBeam™ Field-Free UHR-SEM Column |
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Electron Beam Resolution |
|
|
Magnification |
6x to 2,000,000x |
|
Electron Source |
Schottky field electron emitter |
|
Electron Beam Landing Energy Range |
50 eV - 30 keV |
|
Probe Current |
2 pA – 400 nA (continuosly adjustable) |
|
Ion Optics | |
|
Ion Beam Column |
DeepFIB LMIS Focused Ion Beam Column |
|
Ion Beam Resolution |
2.5 nm @ 30 keV |
|
Maximum Field of View |
1 mm @ 30 keV |
|
Probe Current |
1 pA - 135 nA |
|
Ion Beam Energy Range |
500 eV - 30 keV |
|
Ion Optics | |
|
Ion Beam Column |
Mistral™ Plasma Focused Ion Beam Column |
|
Ion Beam Resolution |
10 nm @ 30 keV |
|
Maximum Field of View |
1 mm @ 30 keV |
|
Probe Current |
1 pA - 3.3 uA |
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Ion Beam Energy Range |
500 eV - 30 keV |
|
Ion Optics | |
|
Ion Beam Column |
iVeloce Plasma Focused Ion Beam Column |
|
Ion Species |
Xe+, O+, Ar+, He+, N+, N2+,C+, ... |
|
Ion Beam Resolution |
25 nm @ 30 keV |
|
Maximum Field of View |
1 mm @ 30 keV |
|
Total probe current |
1 pA–250 nA |
|
Filtered Current |
Ion Beam Energy Range |
|
Ion Beam Energy Range |
3 keV - 30 keV |
|
Ion Optics | |
|
Ion Beam Column |
Veloce LMAIS Focused Ion Beam Column |
|
Ion Species |
Ga+, Ge+, Ge2+, Au+, Au2+, Si+, Au cluster |
|
Ion Beam Resolution |
6 nm @ 30 keV |
|
Maximum Field of View |
1 mm @ 30 keV |
|
Total probe current |
1 pA–50 nA |
|
Filtered Current |
<20 fA to 15 nA |
|
Ion Beam Energy Range |
3 keV - 30 keV |
|
TOF-SIMS | |
|
Lateral resolution |
< 30 nm in Ga+ FIB |
|
Depth Resolution |
< 3 nm in Ga+ FIB |
|
Detection limit |
< 1ppm |
|
Mass Resolution on 28Si |
> 4,500 |
|
Mass range |
1-500 |
|
Detectors | |
|
Standard Detectors |
|
|
Optional Detectors |
|
|
Optional third party Analyzers |
|
|
Gas Injection system | |
|
Optional three-reservoir Gas Injection System solution |
EnerGIS |
|
Stage & Sample | |
|
Stage |
Motorized, 6-axis stage |
|
X & Y axis travel range |
100 mm |
|
Z axis travel range |
50 mm |
|
Upper Rotation |
360° (continuous) |
|
Tilt range |
'-10° to +65° |
|
Lower rotation |
'100° |
Tescan
Libušina třída 21
623 00 Brno
Czech Republic
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