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Precision Patterning for Advanced Nanofabrication

Tescan Essence™ DrawBeam


Expandable software module for high-precision nanopatterning and nanofabrication applications

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Designed for researchers shaping the nanoscale 

Essence™ DrawBeam is an integrated modular patterning engine for Tescan FIB-SEM systems. It enables standard sample FIB processing workflows, such as cross-sectioning, as well as the development and application of advanced nanofabrication workflows, 3D structure creation. With a combination of the highest range of milling objects and layer based automation, it simplifies complex tasks such as preparation of special samples for mechanical testing or dedicated nano prototyped structures.

  • Automate with precision: Batch processing, drift correction, and recipe control assure the best outcome from any sample. 


  • Design flexibly: Import CAD files and tailor parameters for any material, to obtain almost any structure or milled objects you need.


  • Build complex structures: Create 3D nanopatterns using beam-induced deposition assisted by gas-injected precursors.


  • Streamline your workflow: Work directly in the live FIB-SEM view with real-time overlay and control.

WHERE Tescan Essence™ DrawBeam MAKES THE DIFFERENCE

Direct overlay in live FIB-SEM view

Align and fabricate structures precisely, without switching interfaces.   

Purpose-built object library 

Prototype micro and nano-devices using predefined shapes: lines, circles, polygons, and more.

CAD-style multistep patterning

Import bitmap, GDSII, or DXF files and adjust parameters per layer and object.

Batch processing for multifield exposure 

Automate repetitive tasks with DrawBeam Automate’s scalable workflow tools.

Material-driven patterning 

Reference and edit a built-in database with exposure and spacing settings for diverse substrates.

Custom recipe development

Save and reuse complex FIB-SEM preparation protocols tailored to your research.

Drift correction for long exposures 

Maintain alignment and avoid artefacts during extended fabrication runs.

Parallel or serial patterning 

Prevent object overlap and ensure clean, repeatable nanostructures.

3D nanopatterning with FEBID/FIBID 

Create resonators and other complex geometries using a wide range of gas injection precursors.

Accelerated etching 

Use proprietary precursors to boost milling speed across substrates.

Controlled rocking for surface quality 

Improve cross-section perpendicularity and finish with DrawBeam Automate’s rocking stage support.*
*Requires Tescan Rocking Stage 

Advanced Performance

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AI-powered automated workflow

The AI-driven automated lamella preparation reduces human error, shortens training time, and enables reliable unattended operation. The automation is realized through the TEM AutoPrep™ Pro software module and the OptiLift™ nanomanipulator, forming a fully integrated system that delivers fast lamella preparation while ensuring consistent quality.

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Ultimate quality of TEM lamellae 

A fully integrated Aura™ Gentle Ion Beam enables precise final polishing and gentle low-keV Ar⁺ cleaning of TEM lamellae directly inside the AMBER 2 FIB-SEM, minimizing amorphous damage and surface Ga+ contamination.

This built-in solution provides direct, real-time control over the polishing process, ensuring the highest sample quality and optimal results in TEM lamellae preparation, even for the most challenging materials. 

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Tescan Orage 2 APPLICATION EXAMPLES

 

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Tescan Nanomanipulator

Technical highlights
Compatible with all Tescan FIB-SEM systems

X, Y, and Z axis manipulation

Reliable in-situ TEM lamella lift-out

Smooth, low-vibration performance

Easy probe tip replacement using the removable arm

Compatible with all Tescan FIB-SEM systems

X, Y, and Z axis manipulation

Reliable in-situ TEM lamella lift-out

Smooth, low-vibration performance

Easy probe tip replacement using the removable arm

NanoManipulator

GET IN Touch

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Where you can find us:

Tescan Brno
Libušina třída 21
623 00 Brno
Czech Republic



info@Tescan.com 

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