Use an integrated plasma FIB workflow with precise endpoint control and in-situ nanoprobing to achieve clean, planar delayering of sub-20 nm semiconductor nodes. This approach preserves structural integrity and prepares samples for immediate electrical and structural analysis.
- Uniform layer removal: Prevents damage to delicate metals and dielectrics
- Real-time endpoint monitoring: Ensures accurate layer targeting
- In-situ probing: Enables direct electrical testing without sample transfer