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Improving 4D-STEM Phase Mapping with Correlated EDX Signals

Resolve structurally similar crystalline phases with Tescan TENSOR by combining synchronized 4D-STEM and EDX signals for precise and reliable phase mapping.

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A New Standard in 4D-STEM Phase Analysis

When two crystalline phases have almost identical lattice parameters, their electron diffraction patterns may not differ enough for reliable identification. This makes accurate phase identification difficult and affects the reliability of materials characterization workflows.

Tescan TENSOR addresses this limitation by perfectly synchronizing the acquisition of precession-assisted 4D-STEM datasets with EDX signals. Structural and chemical information is collected simultaneously at each pixel, enabling more precise segmentation of phases, even when the difference lies only within a couple of percents in their lattice spacings.

This application note demonstrates how the integration of EDX into 4D-STEM mapping helps to eliminate spurious assignments, improve grain segmentation, and enhance material statistics - all within a unified, user-accessible interface. 

Why Combine 4D-STEM

with EDX?

01
Root of the Problem

Structural Ambiguity in Similar Phases

In some advanced materials, phases of different elemental composition may differ only subtly in their lattice parameters.

In such cases, electron diffraction alone may not resolve these differences, leading to high sensitivity to noise in acquired data and ultimately, in an inaccurate phase analysis.

This presents a challenge for scientists and engineers investigating alloys, thin films, or ceramics where multiple phases coexist with near-identical crystallographic structures. An incorrect phase map may affect downstream functional predictions, process development, and quality assurance.

02
Materials and Methods

A Natively Correlated Multimodal Workflow

The example study for demonstrating the power of correlated multimodal phase analysis used a polycrystalline aluminum film and gold nanoparticles. This challenging sample was analyzed using Tescan TENSOR, operating at 100 kV with the Dectris Quadro direct detector. Two datasets were collected under identical conditions:

  • Beam convergence: 1.5 mrad
  • Beam current: 1.0 nA
  • Precession:  0.8°
  • Dwell time: 10 ms

In one dataset, phase mapping was performed using 4D-STEM diffraction data only. In the other, the algorithm incorporated simultaneously acquired EDX signals to assist template matching of the 4D-STEM data. The ExploreTM software interface enabled straightforward inclusion of the correlated EDX signals in the 4D-STEM data analysis and the phase map calculation.

03
Results and Discussion

Improved Phase Differentiation with Elemental Composition

The comparison revealed that using EDX data in the mapping process eliminated incorrect phase assignments. Regions of pure aluminum were no longer labeled as gold, and gold nanoparticles were correctly segmented.

This correction is not just visual; it also impacts quantitative analysis. Without EDX signals, phase maps can be fragmented by individual grains and consequently, the resulting statistical metrics skewed. The correlative 4D‑STEM/EDX method eliminates such influence of grains in the material, supporting accurate phase analysis that reflects the true material composition.

The approach scales to materials with three or more crystalline phases, providing reliable separation when neither EDX nor diffraction alone can deliver robust and accurate results.

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Tescan Instruments & Technology

Used in This Workflow

Tescan TENSOR

A fully integrated, synchronized scanning transmission electron microscope that simultaneously captures morphology, chemical composition, and internal structure for comprehensive nanoscale characterization.

  • 4D-STEM records the lattice structure of crystalline grains in electron diffraction patterns.
  • ADF-STEM visualizes sample morphology through differences in electron scattering.
  • EDS-STEM maps chemical composition based on characteristic X-ray emission.
  • Beam precession enhances diffraction data quality for more precise structural analysis.
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623 00 Brno
Czech Republic

130405923 us US 37.09024 -95.712891 25.3575 29.349345 20.67957527 42.082797 39.91384763 -33.693421 13.93320106 3.039986586 31.997988 38.050985 47.579533 48.1485965 58.375799 54.663142 19.195447 56.975106 50.493053 45.868592 10.79556993 44.35660598 43.2371604 55.536415 14.557577179752773 32.100937 -6.116829 -6.212299277967318 23.7104 -33.471062 31.998740087 -23.69149395 43.462349 51.529848 49.1893523 49.197486 25.072375 31.075811 1.299027 40.676979 52.30150662 51.013813 35.684121 37.479653 52.246622 40.581349 39.911632 -26.1811371 41.818215 33.429928 -12.08688

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