Accelerate process development with real-time phase and orientation mapping. Get clear insight into nanoscale structures to guide decisions with speed and confidence.
Tescan TENSOR can perform precise strain measurements across large sample areas in complex semiconductor devices, such as 5-nm FinFET circuits or GAA nanosheets.
The precise beam-precession alignments, unrestricted speed of data acquisition, and proprietary strain calculation algorithm ensure high accuracy and precision, helping optimize strain engineering and improve device performance.
Tescan TENSOR’s windowless EDS detectors, combined with high beam currents and 100 kV acceleration, produce strong signals even for light elements such as carbon, nitrogen, and oxygen. This capability is particularly beneficial for small devices like 3D NAND cells.
The EDS analysis can be further augmented by 4D-STEM phase and orientation mapping (ACOM), which integrates seamlessly into the system’s automated workflows, allowing for enhanced characterization with minimal user effort.
TENSOR provides high-quality EDS data using its dual 100 mm² detectors placed near the sample, enabling a total collection solid angle of 2.0 sr. With 100 keV energy and electron beam currents up to 10 nA at a 1 nm beam size, EDS maps are captured in just minutes, as opposed to the typical half-hour.
Additionally, Tescan TENSOR’s rapid switching between STEM imaging and EDS mapping without manual alignments enhances throughput in these routine measurements.
For advanced semiconductor devices like phase change memory modules, Tescan TENSOR enables precise structural failure analysis.
By unambiguously identifying defects such as germanium separation or amorphization in layers and vias, you can diagnose and address failure points with confidence.
Combine Tescan’s 4D-STEM workflow with integrated beam precession to achieve fast, accurate phase and orientation mapping in semiconductor devices. Structural insights are delivered in under 15 minutes, supporting both failure analysis and process optimization.
Tescan TENSOR is an analytical STEM platform for fast, reproducible strain, phase, and composition analysis of semiconductor devices.
It integrates 4D-STEM, beam precession, and high-throughput EDS to deliver precise nanoscale structural and elemental characterization. Optimized for automation and consistency, TENSOR ensures high productivity across shifts and sites.
